A Study of Polycrystalline Silicon Damage Features Based on Nanosecond Pulse Laser Irradiation with Different Wavelength Effects

Based on PVDF (piezoelectric sensing techniques), this paper attempts to study the propagation law of shock waves in brittle materials during the process of three-wavelength laser irradiation of polysilicon, and discusses the formation mechanism of thermal shock failure. The experimental results sho...

Descripción completa

Detalles Bibliográficos
Autores principales: Xu, Jiangmin, Chen, Chao, Zhang, Tengfei, Han, Zhenchun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5503343/
https://www.ncbi.nlm.nih.gov/pubmed/28772620
http://dx.doi.org/10.3390/ma10030260

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5503343/
https://www.ncbi.nlm.nih.gov/pubmed/28772620
http://dx.doi.org/10.3390/ma10030260

Ejemplares similares