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A Study of Polycrystalline Silicon Damage Features Based on Nanosecond Pulse Laser Irradiation with Different Wavelength Effects
Based on PVDF (piezoelectric sensing techniques), this paper attempts to study the propagation law of shock waves in brittle materials during the process of three-wavelength laser irradiation of polysilicon, and discusses the formation mechanism of thermal shock failure. The experimental results sho...
Autores principales: | Xu, Jiangmin, Chen, Chao, Zhang, Tengfei, Han, Zhenchun |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2017
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5503343/ https://www.ncbi.nlm.nih.gov/pubmed/28772620 http://dx.doi.org/10.3390/ma10030260 |
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