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Study on Platinum Coating Depth in Focused Ion Beam Diamond Cutting Tool Milling and Methods for Removing Platinum Layer

In recent years, nanomachining has attracted increasing attention in advanced manufacturing science and technologies as a value-added processes to control material structures, components, devices, and nanoscale systems. To make sub-micro patterns on these products, micro/nanoscale single-crystal dia...

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Detalles Bibliográficos
Autores principales: Choi, Woong Kirl, Baek, Seung Yub
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2015
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5512924/
https://www.ncbi.nlm.nih.gov/pubmed/28793578
http://dx.doi.org/10.3390/ma8095317