Integration of Carbon Nanotubes in Microsystems: Local Growth and Electrical Properties of Contacts

Carbon nanotubes (CNTs) have been directly grown onto a silicon microsystem by a local synthesis method. This method has potential for wafer-level complimentary metal-oxide-semiconductor (CMOS) transistor-compatible integration of CNTs into more complex Si microsystems; enabling, e.g., gas sensors a...

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Detalles Bibliográficos
Autores principales: Haugen, Tormod B., Ta, Bao Q., Halvorsen, Einar, Hoivik, Nils, Aasmundtveit, Knut E.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2013
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5521236/
https://www.ncbi.nlm.nih.gov/pubmed/28811424
http://dx.doi.org/10.3390/ma6083094

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5521236/
https://www.ncbi.nlm.nih.gov/pubmed/28811424
http://dx.doi.org/10.3390/ma6083094

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