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Integration of Carbon Nanotubes in Microsystems: Local Growth and Electrical Properties of Contacts
Carbon nanotubes (CNTs) have been directly grown onto a silicon microsystem by a local synthesis method. This method has potential for wafer-level complimentary metal-oxide-semiconductor (CMOS) transistor-compatible integration of CNTs into more complex Si microsystems; enabling, e.g., gas sensors a...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2013
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5521236/ https://www.ncbi.nlm.nih.gov/pubmed/28811424 http://dx.doi.org/10.3390/ma6083094 |