Local Synthesis of Carbon Nanotubes in Silicon Microsystems: The Effect of Temperature Distribution on Growth Structure

Local synthesis and direct integration of carbon nanotubes (CNTs) into microsystems is a promising method for producing CNT-based devices in a single step, low-cost, and wafer-level, CMOS/MEMS-compatible process. In this report, the structure of the locally grown CNTs are studied by transmission ima...

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Detalles Bibliográficos
Autores principales: Ta, Bao Q., Haugen, Tormod B., Hoivik, Nils, Halvorsen, Einar, Aasmundtveit, Knut E.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2013
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5521240/
https://www.ncbi.nlm.nih.gov/pubmed/28811428
http://dx.doi.org/10.3390/ma6083160

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5521240/
https://www.ncbi.nlm.nih.gov/pubmed/28811428
http://dx.doi.org/10.3390/ma6083160

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