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Porous Dielectrics in Microelectronic Wiring Applications

Porous insulators are utilized in the wiring structure of microelectronic devices as a means of reducing, through low dielectric permittivity, power consumption and signal delay in integrated circuits. They are typically based on low density modifications of amorphous SiO(2) known as SiCOH or carbon...

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Detalles Bibliográficos
Autor principal: McGahay, Vincent
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International 2010
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5525179/
http://dx.doi.org/10.3390/ma3010536