Fabrication of three-dimensional suspended, interlayered and hierarchical nanostructures by accuracy-improved electron beam lithography overlay

Nanofabrication techniques are essential for exploring nanoscience and many closely related research fields such as materials, electronics, optics and photonics. Recently, three-dimensional (3D) nanofabrication techniques have been actively investigated through many different ways, however, it is st...

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Detalles Bibliográficos
Autores principales: Yoon, Gwanho, Kim, Inki, So, Sunae, Mun, Jungho, Kim, Minkyung, Rho, Junsuk
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5532261/
https://www.ncbi.nlm.nih.gov/pubmed/28751643
http://dx.doi.org/10.1038/s41598-017-06833-5

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5532261/
https://www.ncbi.nlm.nih.gov/pubmed/28751643
http://dx.doi.org/10.1038/s41598-017-06833-5

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