Comparison of Erosion Behavior and Particle Contamination in Mass-Production CF(4)/O(2) Plasma Chambers Using Y(2)O(3) and YF(3) Protective Coatings

Yttrium fluoride (YF(3)) and yttrium oxide (Y(2)O(3)) protective coatings prepared using an atmospheric plasma spraying technique were used to investigate the relationship between surface erosion behaviors and their nanoparticle generation under high-density plasma (10(12)–10(13) cm(−3)) etching. As...

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Detalles Bibliográficos
Autores principales: Lin, Tzu-Ken, Wang, Wei-Kai, Huang, Shih-Yung, Tasi, Chi-Tsung, Wuu, Dong-Sing
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5535249/
https://www.ncbi.nlm.nih.gov/pubmed/28708079
http://dx.doi.org/10.3390/nano7070183

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5535249/
https://www.ncbi.nlm.nih.gov/pubmed/28708079
http://dx.doi.org/10.3390/nano7070183

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