Novel Gas Sensor Arrays Based on High-Q SAM-Modified Piezotransduced Single-Crystal Silicon Bulk Acoustic Resonators

This paper demonstrates a novel micro-size (120 μm × 200 μm) piezoelectric gas sensor based on a piezotransduced single-crystal silicon bulk acoustic resonator (PSBAR). The PSBARs operate at 102 MHz and possess high Q values (about 2000), ensuring the stability of the measurement. A corresponding ga...

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Detalles Bibliográficos
Autores principales: Zhao, Yuan, Yang, Qingrui, Chang, Ye, Pang, Wei, Zhang, Hao, Duan, Xuexin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5539522/
https://www.ncbi.nlm.nih.gov/pubmed/28672852
http://dx.doi.org/10.3390/s17071507

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5539522/
https://www.ncbi.nlm.nih.gov/pubmed/28672852
http://dx.doi.org/10.3390/s17071507

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