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Influence of Discharge Current on Phase Transition Properties of High Quality Polycrystalline VO(2) Thin Film Fabricated by HiPIMS
To fabricate high-quality polycrystalline VO(2) thin film with a metal–insulator transition (MIT) temperature less than 50 °C, high-power impulse magnetron sputtering with different discharge currents was employed in this study. The as-deposited VO(2) films were characterized by a four-point probe r...
Autores principales: | , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2017
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5554014/ https://www.ncbi.nlm.nih.gov/pubmed/28772990 http://dx.doi.org/10.3390/ma10060633 |