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Influence of Discharge Current on Phase Transition Properties of High Quality Polycrystalline VO(2) Thin Film Fabricated by HiPIMS

To fabricate high-quality polycrystalline VO(2) thin film with a metal–insulator transition (MIT) temperature less than 50 °C, high-power impulse magnetron sputtering with different discharge currents was employed in this study. The as-deposited VO(2) films were characterized by a four-point probe r...

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Detalles Bibliográficos
Autores principales:	Lin, Tiegui, Wang, Jian, Liu, Gang, Wang, Langping, Wang, Xiaofeng, Zhang, Yufen
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2017
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5554014/ https://www.ncbi.nlm.nih.gov/pubmed/28772990 http://dx.doi.org/10.3390/ma10060633

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