Cargando…

Effect of Isopropyl Alcohol Concentration and Etching Time on Wet Chemical Anisotropic Etching of Low-Resistivity Crystalline Silicon Wafer

A micropyramid structure was formed on the surface of a monocrystalline silicon wafer (100) using a wet chemical anisotropic etching technique. The main objective was to evaluate the performance of the etchant based on the silicon surface reflectance. Different isopropyl alcohol (IPA) volume concent...

Descripción completa

Detalles Bibliográficos
Autores principales:	Abdur-Rahman, Eyad, Alghoraibi, Ibrahim, Alkurdi, Hassan
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Hindawi 2017
Materias:	Research Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5554996/ https://www.ncbi.nlm.nih.gov/pubmed/28831284 http://dx.doi.org/10.1155/2017/7542870

Ejemplares similares

Level Set Approach to Anisotropic Wet Etching of Silicon
por: Radjenović, Branislav, et al.
Publicado: (2010)

Effect of tetramethylammonium hydroxide/isopropyl alcohol wet etching on geometry and surface roughness of silicon nanowires fabricated by AFM lithography
por: Yusoh, Siti Noorhaniah, et al.
Publicado: (2016)

Wafer-Scale Fabrication of Silicon Nanocones via Controlling Catalyst Evolution in All-Wet Metal-Assisted Chemical Etching
por: Bian, Chenyu, et al.
Publicado: (2022)

A confined-etching strategy for intrinsic anisotropic surface wetting patterning
por: Feng, Rui, et al.
Publicado: (2022)

Nonlinear Etch Rate of Au-Assisted Chemical Etching of Silicon
por: Choi, Keorock, et al.
Publicado: (2017)

Deep Etching of Silicon Based on Metal-Assisted Chemical Etching
por: Nur’aini, Anafi, et al.
Publicado: (2022)

Light transmission and internal scattering in pulsed laser-etched partially-transparent silicon wafers
por: Rohaizar, Muhd Hatim, et al.
Publicado: (2019)

Silicon Nanotubes Fabricated by Wet Chemical Etching of ZnO/Si Core–Shell Nanowires
por: Sun, Yong-Lie, et al.
Publicado: (2020)

Surface Modification of Additively Manufactured Nitinol by Wet Chemical Etching
por: Nazarov, Denis, et al.
Publicado: (2021)

Two-Layer Microstructures Fabricated by One-Step Anisotropic Wet Etching of Si in KOH Solution †
por: Lu, Han, et al.
Publicado: (2016)

Triangle pore arrays fabricated on Si (111) substrate by sphere lithography combined with metal-assisted chemical etching and anisotropic chemical etching
por: Asoh, Hidetaka, et al.
Publicado: (2012)

A MEMS Micro-g Capacitive Accelerometer Based on Through-Silicon-Wafer-Etching Process
por: Rao, Kang, et al.
Publicado: (2019)

Surface Modification of Silicon Carbide Wafers Using Atmospheric Plasma Etching: Effects of Processing Parameters
por: Jin, Qi, et al.
Publicado: (2023)

Difference in anisotropic etching characteristics of alkaline and copper based acid solutions for single-crystalline Si
por: Chen, Wei, et al.
Publicado: (2018)

Anisotropic Etching of InGaN Thin Films with Photoelectrochemical Etching to Form Quantum Dots
por: Wei, Xiongliang, et al.
Publicado: (2023)

A high-precision, template-assisted, anisotropic wet etching method for fabricating perovskite microstructure arrays
por: Hu, Xue-fang, et al.
Publicado: (2020)

Unraveling the Morphological Evolution and Etching Kinetics of Porous Silicon Nanowires During Metal-Assisted Chemical Etching
por: Vinzons, Lester U., et al.
Publicado: (2017)

Silicon Conical Structures by Metal Assisted Chemical Etching
por: Pérez-Díaz, Oscar, et al.
Publicado: (2020)

Metal-Assisted Chemical Etching for Anisotropic Deep Trenching of GaN Array
por: Wang, Qi, et al.
Publicado: (2021)

Wafer-Scale Fabrication of Ultra-High Aspect Ratio, Microscale Silicon Structures with Smooth Sidewalls Using Metal Assisted Chemical Etching
por: Zhang, Xiaomeng, et al.
Publicado: (2023)

Anisotropic etching of platinum electrodes at the onset of cathodic corrosion
por: Hersbach, Thomas J. P., et al.
Publicado: (2016)

Characterization of an Etch Profile at a Wafer Edge in Capacitively Coupled Plasma
por: Seong, Inho, et al.
Publicado: (2022)

Non-Lithographic Silicon Micromachining Using Inkjet and Chemical Etching
por: Hoshian, Sasha, et al.
Publicado: (2016)

Optimization of Metal-Assisted Chemical Etching for Deep Silicon Nanostructures
por: Akan, Rabia, et al.
Publicado: (2021)

Catalytic Growth of Gallium Nitride Nanowires on Wet Chemically Etched Substrates by Chemical Vapor Deposition
por: Sankaranarayanan, Sanjay, et al.
Publicado: (2019)

Growing Embossed Nanostructures of Polymer Brushes on Wet-Etched Silicon Templated via Block Copolymers
por: Lu, Xiaobin, et al.
Publicado: (2016)

Effect of additional etching and ethanol-wet bonding on the dentin bond strength of one-step self-etch adhesives
por: Ahn, Joonghee, et al.
Publicado: (2015)

Systematic Characterization of Plasma-Etched Trenches on 4H-SiC Wafers
por: Pirnaci, Massimo D., et al.
Publicado: (2021)

Surface Roughness of Z-Cut Quartz Etched by Ammonium Bifluoride and Ammonium Bifluoride Mixed with Isopropyl Alcohol Solutions
por: Zhang, Zhaoyun, et al.
Publicado: (2017)

Photomechanical and chemical etching techniques
por: CERN. Geneva. Super Proton Synchrotron Division (SPS)
Publicado: (1974)

Selective emitter using a screen printed etch barrier in crystalline silicon solar cell
por: Song, Kyuwan, et al.
Publicado: (2012)

Catalytic activity of noble metals for metal-assisted chemical etching of silicon
por: Yae, Shinji, et al.
Publicado: (2012)

Chemical Etching of Zinc Oxide for Thin-Film Silicon Solar Cells
por: Hüpkes, Jürgen, et al.
Publicado: (2012)

Silicon Nanowires Synthesis by Metal-Assisted Chemical Etching: A Review
por: Leonardi, Antonio Alessio, et al.
Publicado: (2021)

Understanding the effect of HF-based wet shallow etching on optical performance of reactive-ion-etched fused silica optics
por: Sun, Laixi, et al.
Publicado: (2021)

Crystallographically Determined Etching and Its Relevance to the Metal-Assisted Catalytic Etching (MACE) of Silicon Powders
por: Kolasinski, Kurt W., et al.
Publicado: (2019)

Understanding the effect of wet etching on damage resistance of surface scratches
por: Da Costa Fernandes, Benoit, et al.
Publicado: (2018)

Patterning of graphene using wet etching with hypochlorite and UV light
por: Zhang, Minfang, et al.
Publicado: (2022)

Silicon etching using only Oxygen at high temperature: An alternative approach to Si micro-machining on 150 mm Si wafers
por: Chai, Jessica, et al.
Publicado: (2015)

Extreme wettability of nanostructured glass fabricated by non-lithographic, anisotropic etching
por: Yu, Eusun, et al.
Publicado: (2015)

Cannot write session to /tmp/vufind_sessions/sess_kvvebr3uv6cqlapv46uvsmifsb