Maskless X-Ray Writing of Electrical Devices on a Superconducting Oxide with Nanometer Resolution and Online Process Monitoring

X-ray nanofabrication has so far been usually limited to mask methods involving photoresist impression and subsequent etching. Herein we show that an innovative maskless X-ray nanopatterning approach allows writing electrical devices with nanometer feature size. In particular we fabricated a Josephs...

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Detalles Bibliográficos
Autores principales: Mino, Lorenzo, Bonino, Valentina, Agostino, Angelo, Prestipino, Carmelo, Borfecchia, Elisa, Lamberti, Carlo, Operti, Lorenza, Fretto, Matteo, De Leo, Natascia, Truccato, Marco
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5567384/
https://www.ncbi.nlm.nih.gov/pubmed/28831111
http://dx.doi.org/10.1038/s41598-017-09443-3

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5567384/
https://www.ncbi.nlm.nih.gov/pubmed/28831111
http://dx.doi.org/10.1038/s41598-017-09443-3

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