Grazing-incidence small-angle X-ray scattering (GISAXS) on small periodic targets using large beams

Grazing-incidence small-angle X-ray scattering (GISAXS) is often used as a versatile tool for the contactless and destruction-free investigation of nano­structured surfaces. However, due to the shallow incidence angles, the footprint of the X-ray beam is significantly elongated, limiting GISAXS to s...

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Detalles Bibliográficos
Autores principales: Pflüger, Mika, Soltwisch, Victor, Probst, Jürgen, Scholze, Frank, Krumrey, Michael
Formato: Online Artículo Texto
Lenguaje:English
Publicado: International Union of Crystallography 2017
Materias:
Research Papers
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5571806/
https://www.ncbi.nlm.nih.gov/pubmed/28875030
http://dx.doi.org/10.1107/S2052252517006297

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5571806/
https://www.ncbi.nlm.nih.gov/pubmed/28875030
http://dx.doi.org/10.1107/S2052252517006297

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