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Grazing-incidence small-angle X-ray scattering (GISAXS) on small periodic targets using large beams

Grazing-incidence small-angle X-ray scattering (GISAXS) is often used as a versatile tool for the contactless and destruction-free investigation of nano­structured surfaces. However, due to the shallow incidence angles, the footprint of the X-ray beam is significantly elongated, limiting GISAXS to s...

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Autores principales: Pflüger, Mika, Soltwisch, Victor, Probst, Jürgen, Scholze, Frank, Krumrey, Michael
Formato: Online Artículo Texto
Lenguaje:English
Publicado: International Union of Crystallography 2017
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5571806/
https://www.ncbi.nlm.nih.gov/pubmed/28875030
http://dx.doi.org/10.1107/S2052252517006297
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author Pflüger, Mika
Soltwisch, Victor
Probst, Jürgen
Scholze, Frank
Krumrey, Michael
author_facet Pflüger, Mika
Soltwisch, Victor
Probst, Jürgen
Scholze, Frank
Krumrey, Michael
author_sort Pflüger, Mika
collection PubMed
description Grazing-incidence small-angle X-ray scattering (GISAXS) is often used as a versatile tool for the contactless and destruction-free investigation of nano­structured surfaces. However, due to the shallow incidence angles, the footprint of the X-ray beam is significantly elongated, limiting GISAXS to samples with typical target lengths of several millimetres. For many potential applications, the production of large target areas is impractical, and the targets are surrounded by structured areas. Because the beam footprint is larger than the targets, the surrounding structures contribute parasitic scattering, burying the target signal. In this paper, GISAXS measurements of isolated as well as surrounded grating targets in Si substrates with line lengths from 50 µm down to 4 µm are presented. For the isolated grating targets, the changes in the scattering patterns due to the reduced target length are explained. For the surrounded grating targets, the scattering signal of a 15 µm × 15 µm target grating structure is separated from the scattering signal of 100 µm × 100 µm nanostructured surroundings by producing the target with a different orientation with respect to the predominant direction of the surrounding structures. As virtually all litho­graphically produced nanostructures have a predominant direction, the described technique allows GISAXS to be applied in a range of applications, e.g. for characterization of metrology fields in the semiconductor industry, where up to now it has been considered impossible to use this method due to the large beam footprint.
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spelling pubmed-55718062017-09-05 Grazing-incidence small-angle X-ray scattering (GISAXS) on small periodic targets using large beams Pflüger, Mika Soltwisch, Victor Probst, Jürgen Scholze, Frank Krumrey, Michael IUCrJ Research Papers Grazing-incidence small-angle X-ray scattering (GISAXS) is often used as a versatile tool for the contactless and destruction-free investigation of nano­structured surfaces. However, due to the shallow incidence angles, the footprint of the X-ray beam is significantly elongated, limiting GISAXS to samples with typical target lengths of several millimetres. For many potential applications, the production of large target areas is impractical, and the targets are surrounded by structured areas. Because the beam footprint is larger than the targets, the surrounding structures contribute parasitic scattering, burying the target signal. In this paper, GISAXS measurements of isolated as well as surrounded grating targets in Si substrates with line lengths from 50 µm down to 4 µm are presented. For the isolated grating targets, the changes in the scattering patterns due to the reduced target length are explained. For the surrounded grating targets, the scattering signal of a 15 µm × 15 µm target grating structure is separated from the scattering signal of 100 µm × 100 µm nanostructured surroundings by producing the target with a different orientation with respect to the predominant direction of the surrounding structures. As virtually all litho­graphically produced nanostructures have a predominant direction, the described technique allows GISAXS to be applied in a range of applications, e.g. for characterization of metrology fields in the semiconductor industry, where up to now it has been considered impossible to use this method due to the large beam footprint. International Union of Crystallography 2017-05-24 /pmc/articles/PMC5571806/ /pubmed/28875030 http://dx.doi.org/10.1107/S2052252517006297 Text en © Mika Pflüger et al. 2017 http://creativecommons.org/licenses/by/2.0/uk/ This is an open-access article distributed under the terms of the Creative Commons Attribution (CC-BY) Licence, which permits unrestricted use, distribution, and reproduction in any medium, provided the original authors and source are cited.http://creativecommons.org/licenses/by/2.0/uk/
spellingShingle Research Papers
Pflüger, Mika
Soltwisch, Victor
Probst, Jürgen
Scholze, Frank
Krumrey, Michael
Grazing-incidence small-angle X-ray scattering (GISAXS) on small periodic targets using large beams
title Grazing-incidence small-angle X-ray scattering (GISAXS) on small periodic targets using large beams
title_full Grazing-incidence small-angle X-ray scattering (GISAXS) on small periodic targets using large beams
title_fullStr Grazing-incidence small-angle X-ray scattering (GISAXS) on small periodic targets using large beams
title_full_unstemmed Grazing-incidence small-angle X-ray scattering (GISAXS) on small periodic targets using large beams
title_short Grazing-incidence small-angle X-ray scattering (GISAXS) on small periodic targets using large beams
title_sort grazing-incidence small-angle x-ray scattering (gisaxs) on small periodic targets using large beams
topic Research Papers
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5571806/
https://www.ncbi.nlm.nih.gov/pubmed/28875030
http://dx.doi.org/10.1107/S2052252517006297
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