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Grazing-incidence small-angle X-ray scattering (GISAXS) on small periodic targets using large beams
Grazing-incidence small-angle X-ray scattering (GISAXS) is often used as a versatile tool for the contactless and destruction-free investigation of nanostructured surfaces. However, due to the shallow incidence angles, the footprint of the X-ray beam is significantly elongated, limiting GISAXS to s...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
International Union of Crystallography
2017
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5571806/ https://www.ncbi.nlm.nih.gov/pubmed/28875030 http://dx.doi.org/10.1107/S2052252517006297 |