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Nanoscale 2.5-dimensional surface patterning with plasmonic lithography

We report an extension of plasmonic lithography to nanoscale 2.5-dimensional (2.5D) surface patterning. To obtain the impulse response of a plasmonic lithography system, we described the field distribution of a point dipole source generated by a metallic ridge aperture with a theoretical model using...

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Detalles Bibliográficos
Autores principales: Jung, Howon, Park, Changhoon, Oh, Seonghyeon, Hahn, Jae W.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2017
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5575353/
https://www.ncbi.nlm.nih.gov/pubmed/28852013
http://dx.doi.org/10.1038/s41598-017-10047-0