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Nanoscale 2.5-dimensional surface patterning with plasmonic lithography
We report an extension of plasmonic lithography to nanoscale 2.5-dimensional (2.5D) surface patterning. To obtain the impulse response of a plasmonic lithography system, we described the field distribution of a point dipole source generated by a metallic ridge aperture with a theoretical model using...
Autores principales: | Jung, Howon, Park, Changhoon, Oh, Seonghyeon, Hahn, Jae W. |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2017
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5575353/ https://www.ncbi.nlm.nih.gov/pubmed/28852013 http://dx.doi.org/10.1038/s41598-017-10047-0 |
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