Method for Measurement of Multi-Degrees-of-Freedom Motion Parameters Based on Polydimethylsiloxane Cross-Coupling Diffraction Gratings

This work presents a multi-degrees-of-freedom motion parameter measurement method based on the use of cross-coupling diffraction gratings that were prepared on the two sides of a polydimethylsiloxane (PDMS) substrate using oxygen plasma processing technology. The laser beam that travels pass the cro...

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Detalles Bibliográficos
Autores principales: Duan, Junping, Zhu, Qiang, Qian, Kun, Guo, Hao, Zhang, Binzhen
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer US 2017
Materias:
Nano Idea
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5577433/
https://www.ncbi.nlm.nih.gov/pubmed/28856603
http://dx.doi.org/10.1186/s11671-017-2289-0

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5577433/
https://www.ncbi.nlm.nih.gov/pubmed/28856603
http://dx.doi.org/10.1186/s11671-017-2289-0

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