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Near-Field Optical Drilling of Sub-λ Pits in Thin Polymer Films
[Image: see text] Under UV illumination, polymer films can undergo chain scission and contract. Using this effect, tightly focused laser light is shown to develop runaway near-field concentration that drills sub-100 nm pits through a thin film. This subwavelength photolithography can be controlled i...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
American
Chemical Society
2017
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5578361/ https://www.ncbi.nlm.nih.gov/pubmed/28868327 http://dx.doi.org/10.1021/acsphotonics.6b01000 |