A Study on AIN Film-Based SAW Attenuation in Liquids and Their Potential as Liquid Ethanol Sensors

In this paper, we report attenuation characteristics of aluminum nitride (AIN) film-based surface acoustic waves (SAWs) in liquids and their potential as liquid ethanol sensors. An AIN film-based SAW resonator was fabricated for liquid sensing application. The fabricated SAW device had a Rayleigh wa...

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Detalles Bibliográficos
Autores principales: Wang, Yong, Xu, Zhonggui, Wang, Yinshen, Xie, Jin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5579530/
https://www.ncbi.nlm.nih.gov/pubmed/28783095
http://dx.doi.org/10.3390/s17081813

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5579530/
https://www.ncbi.nlm.nih.gov/pubmed/28783095
http://dx.doi.org/10.3390/s17081813

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