Sensitivity and Frequency-Response Improvement of a Thermal Convection–Based Accelerometer

This paper presents a thermal convection–based sensor fabricated using simple microelectromechanical systems (MEMS)-based processes. This sensor can be applied to both acceleration and inclination measurements without modifying the structure. Because the operating mechanism of the accelerometer is t...

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Detalles Bibliográficos
Autores principales: Han, Maeum, Kim, Jae Keon, Park, Jin-Hyoung, Kim, Woojin, Kang, Shin-Won, Kong, Seong Ho, Jung, Daewoong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5579545/
https://www.ncbi.nlm.nih.gov/pubmed/28767051
http://dx.doi.org/10.3390/s17081765

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5579545/
https://www.ncbi.nlm.nih.gov/pubmed/28767051
http://dx.doi.org/10.3390/s17081765

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