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Sensitivity and Frequency-Response Improvement of a Thermal Convection–Based Accelerometer

This paper presents a thermal convection–based sensor fabricated using simple microelectromechanical systems (MEMS)-based processes. This sensor can be applied to both acceleration and inclination measurements without modifying the structure. Because the operating mechanism of the accelerometer is t...

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Detalles Bibliográficos
Autores principales:	Han, Maeum, Kim, Jae Keon, Park, Jin-Hyoung, Kim, Woojin, Kang, Shin-Won, Kong, Seong Ho, Jung, Daewoong
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2017
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5579545/ https://www.ncbi.nlm.nih.gov/pubmed/28767051 http://dx.doi.org/10.3390/s17081765

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