Optimization of a VOC Sensor with a Bilayered Diaphragm Using FBAR as Strain Sensing Elements

Film bulk acoustic resonators (FBARs) are widely applied in mass bio-sensing and pressure sensors, owing to their extreme sensitivity and integration ability, and ability to miniaturize circuits. A volatile organic compound (VOC) sensor with a polymer-coated diaphragm, using FBARs as a strain sensin...

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Detalles Bibliográficos
Autores principales: Guo, Huihui, Guo, Aohui, Gao, Yang, Liu, Tingting
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5580034/
https://www.ncbi.nlm.nih.gov/pubmed/28763042
http://dx.doi.org/10.3390/s17081764

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5580034/
https://www.ncbi.nlm.nih.gov/pubmed/28763042
http://dx.doi.org/10.3390/s17081764

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