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Optimization of a VOC Sensor with a Bilayered Diaphragm Using FBAR as Strain Sensing Elements
Film bulk acoustic resonators (FBARs) are widely applied in mass bio-sensing and pressure sensors, owing to their extreme sensitivity and integration ability, and ability to miniaturize circuits. A volatile organic compound (VOC) sensor with a polymer-coated diaphragm, using FBARs as a strain sensin...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2017
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5580034/ https://www.ncbi.nlm.nih.gov/pubmed/28763042 http://dx.doi.org/10.3390/s17081764 |