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Laser processing of thin-film multilayer structures: comparison between a 3D thermal model and experimental results
In this research, a numerical model is introduced for simulation of laser processing of thin film multilayer structures, to predict the temperature and ablated area for a set of laser parameters including average power and repetition rate. Different thin-films on Si substrate were processed by nanos...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Beilstein-Institut
2017
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5588606/ https://www.ncbi.nlm.nih.gov/pubmed/28904836 http://dx.doi.org/10.3762/bjnano.8.176 |