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Simultaneous measurements of top surface and its underlying film surfaces in multilayer film structure
With the growth of 3D packaging technology and the development of flexible, transparent electrodes, the use of multilayer thin-films is steadily increasing throughout high-tech industries including semiconductor, flat panel display, and solar photovoltaic industries. Also, this in turn leads to an i...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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Nature Publishing Group UK
2017
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5605665/ https://www.ncbi.nlm.nih.gov/pubmed/28928486 http://dx.doi.org/10.1038/s41598-017-11825-6 |