Fabrication of Nanoscale Pits with High Throughput on Polymer Thin Film Using AFM Tip-Based Dynamic Plowing Lithography

We show that an atomic force microscope (AFM) tip-based dynamic plowing lithography (DPL) approach can be used to fabricate nanoscale pits with high throughput. The method relies on scratching with a relatively large speed over a sample surface in tapping mode, which is responsible for the separatio...

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Detalles Bibliográficos
Autores principales: He, Yang, Geng, Yanquan, Yan, Yongda, Luo, Xichun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer US 2017
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5610139/
https://www.ncbi.nlm.nih.gov/pubmed/28940164
http://dx.doi.org/10.1186/s11671-017-2319-y

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5610139/
https://www.ncbi.nlm.nih.gov/pubmed/28940164
http://dx.doi.org/10.1186/s11671-017-2319-y

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