CO(2) Sensing Characteristics of a La(2)O(3)/SnO(2) Stacked Structure with Micromachined Hotplates

Demand for the detection of carbon dioxide (CO [Formula: see text]) is increasing in various fields, including air-quality monitoring, healthcare, and agriculture. On the other hand, smart gas sensors, in which micromachined gas sensors are integrated with driving circuits, are desirable toward the...

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Detalles Bibliográficos
Autores principales: Iwata, Tatsuya, Matsuda, Kyosuke, Takahashi, Kazuhiro, Sawada, Kazuaki
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5621031/
https://www.ncbi.nlm.nih.gov/pubmed/28930146
http://dx.doi.org/10.3390/s17092156

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5621031/
https://www.ncbi.nlm.nih.gov/pubmed/28930146
http://dx.doi.org/10.3390/s17092156

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