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CO(2) Sensing Characteristics of a La(2)O(3)/SnO(2) Stacked Structure with Micromachined Hotplates
Demand for the detection of carbon dioxide (CO [Formula: see text]) is increasing in various fields, including air-quality monitoring, healthcare, and agriculture. On the other hand, smart gas sensors, in which micromachined gas sensors are integrated with driving circuits, are desirable toward the...
Autores principales: | Iwata, Tatsuya, Matsuda, Kyosuke, Takahashi, Kazuhiro, Sawada, Kazuaki |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2017
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5621031/ https://www.ncbi.nlm.nih.gov/pubmed/28930146 http://dx.doi.org/10.3390/s17092156 |
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