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An Electrochemical, Low-Frequency Seismic Micro-Sensor Based on MEMS with a Force-Balanced Feedback System

Electrochemical seismic sensors are key components in monitoring ground vibration, which are featured with high performances in the low-frequency domain. However, conventional electrochemical seismic sensors suffer from low repeatability due to limitations in fabrication and limited bandwidth. This...

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Detalles Bibliográficos
Autores principales: Li, Guanglei, Wang, Junbo, Chen, Deyong, Chen, Jian, Chen, Lianhong, Xu, Chao
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5621127/
https://www.ncbi.nlm.nih.gov/pubmed/28902150
http://dx.doi.org/10.3390/s17092103