Application of Surface Protective Coating to Enhance Environment-Withstanding Property of the MEMS 2D Wind Direction and Wind Speed Sensor

In this study, a microelectromechanical system (MEMS) two-dimensional (2D) wind direction and wind speed sensor consisting of a square heating source and four thermopiles was manufactured using the heat detection method. The heating source and thermopiles of the manufactured sensor must be exposed t...

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Detalles Bibliográficos
Autores principales: Shin, Kyu-Sik, Lee, Dae-Sung, Song, Sang-Woo, Jung, Jae Pil
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5621159/
https://www.ncbi.nlm.nih.gov/pubmed/28925942
http://dx.doi.org/10.3390/s17092152

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5621159/
https://www.ncbi.nlm.nih.gov/pubmed/28925942
http://dx.doi.org/10.3390/s17092152

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