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Application of Surface Protective Coating to Enhance Environment-Withstanding Property of the MEMS 2D Wind Direction and Wind Speed Sensor
In this study, a microelectromechanical system (MEMS) two-dimensional (2D) wind direction and wind speed sensor consisting of a square heating source and four thermopiles was manufactured using the heat detection method. The heating source and thermopiles of the manufactured sensor must be exposed t...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2017
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5621159/ https://www.ncbi.nlm.nih.gov/pubmed/28925942 http://dx.doi.org/10.3390/s17092152 |