High-Sensitivity Encoder-Like Micro Area-Changed Capacitive Transducer for a Nano-g Micro Accelerometer

Encoder-like micro area-changed capacitive transducers are advantageous in terms of their better linearity and larger dynamic range compared to gap-changed capacitive transducers. Such transducers have been widely applied in rectilinear and rotational position sensors, lab-on-a-chip applications and...

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Detalles Bibliográficos
Autores principales: Wu, Wenjie, Zheng, Panpan, Liu, Jinquan, Li, Zhu, Fan, Ji, Liu, Huafeng, Tu, Liangcheng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5621371/
https://www.ncbi.nlm.nih.gov/pubmed/28930176
http://dx.doi.org/10.3390/s17092158

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5621371/
https://www.ncbi.nlm.nih.gov/pubmed/28930176
http://dx.doi.org/10.3390/s17092158

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