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Morphological Evolution of Pit-Patterned Si(001) Substrates Driven by Surface-Energy Reduction
Lateral ordering of heteroepitaxial islands can be conveniently achieved by suitable pit-patterning of the substrate prior to deposition. Controlling shape, orientation, and size of the pits is not trivial as, being metastable, they can significantly evolve during deposition/annealing. In this paper...
Autores principales: | Salvalaglio, Marco, Backofen, Rainer, Voigt, Axel, Montalenti, Francesco |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Springer US
2017
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5622022/ https://www.ncbi.nlm.nih.gov/pubmed/28963645 http://dx.doi.org/10.1186/s11671-017-2320-5 |
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