Anticipating, measuring, and minimizing MEMS mirror scan error to improve laser scanning microscopy's speed and accuracy

We describe a method to speed up microelectromechanical system (MEMS) mirror scanning by > 20x, while also improving scan accuracy. We use Landweber deconvolution to determine an input voltage which would produce a desired output, based on the measured MEMS impulse response. Since the MEMS is wea...

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Detalles Bibliográficos
Autores principales: Giannini, John P., York, Andrew G., Shroff, Hari
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Public Library of Science 2017
Materias:
Research Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5626505/
https://www.ncbi.nlm.nih.gov/pubmed/28973013
http://dx.doi.org/10.1371/journal.pone.0185849

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5626505/
https://www.ncbi.nlm.nih.gov/pubmed/28973013
http://dx.doi.org/10.1371/journal.pone.0185849

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