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Performance improvement of miniaturized ZnO nanowire accelerometer fabricated by refresh hydrothermal synthesis
Miniaturized accelerometers are necessary for evaluating the performance of small devices, such as haptics, robotics and simulators. In this study, we fabricated miniaturized accelerometers using well-aligned ZnO nanowires. The layer of ZnO nanowires is used for active piezoelectric layer of the acc...
Autores principales: | , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
The Royal Society Publishing
2017
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5627100/ https://www.ncbi.nlm.nih.gov/pubmed/28989760 http://dx.doi.org/10.1098/rsos.170557 |