Effect of slurry composition on the chemical mechanical polishing of thin diamond films

Nanocrystalline diamond (NCD) thin films grown by chemical vapour deposition have an intrinsic surface roughness, which hinders the development and performance of the films’ various applications. Traditional methods of diamond polishing are not effective on NCD thin films. Films either shatter due t...

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Detalles Bibliográficos
Autores principales: Werrell, Jessica M., Mandal, Soumen, Thomas, Evan L. H., Brousseau, Emmanuel B., Lewis, Ryan, Borri, Paola, Davies, Philip R., Williams, Oliver A.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Taylor & Francis 2017
Materias:
Optical, Magnetic and Electronic Device Materials
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5642826/
https://www.ncbi.nlm.nih.gov/pubmed/29057022
http://dx.doi.org/10.1080/14686996.2017.1366815

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5642826/
https://www.ncbi.nlm.nih.gov/pubmed/29057022
http://dx.doi.org/10.1080/14686996.2017.1366815

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