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Advanced Silicon-on-Insulator: Crystalline Silicon on Atomic Layer Deposited Beryllium Oxide

Silicon-on-insulator (SOI) technology improves the performance of devices by reducing parasitic capacitance. Devices based on SOI or silicon-on-sapphire technology are primarily used in high-performance radio frequency (RF) and radiation sensitive applications as well as for reducing the short chann...

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Autores principales: Min Lee, Seung, Hwan Yum, Jung, Larsen, Eric S., Chul Lee, Woo, Keun Kim, Seong, Bielawski, Christopher W., Oh, Jungwoo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2017
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5643296/
https://www.ncbi.nlm.nih.gov/pubmed/29038543
http://dx.doi.org/10.1038/s41598-017-13693-6
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author Min Lee, Seung
Hwan Yum, Jung
Larsen, Eric S.
Chul Lee, Woo
Keun Kim, Seong
Bielawski, Christopher W.
Oh, Jungwoo
author_facet Min Lee, Seung
Hwan Yum, Jung
Larsen, Eric S.
Chul Lee, Woo
Keun Kim, Seong
Bielawski, Christopher W.
Oh, Jungwoo
author_sort Min Lee, Seung
collection PubMed
description Silicon-on-insulator (SOI) technology improves the performance of devices by reducing parasitic capacitance. Devices based on SOI or silicon-on-sapphire technology are primarily used in high-performance radio frequency (RF) and radiation sensitive applications as well as for reducing the short channel effects in microelectronic devices. Despite their advantages, the high substrate cost and overheating problems associated with complexities in substrate fabrication as well as the low thermal conductivity of silicon oxide prevent broad applications of this technology. To overcome these challenges, we describe a new approach of using beryllium oxide (BeO). The use of atomic layer deposition (ALD) for producing this material results in lowering the SOI wafer production cost. Furthermore, the use of BeO exhibiting a high thermal conductivity might minimize the self-heating issues. We show that crystalline Si can be grown on ALD BeO and the resultant devices exhibit potential for use in advanced SOI technology applications.
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spelling pubmed-56432962017-10-19 Advanced Silicon-on-Insulator: Crystalline Silicon on Atomic Layer Deposited Beryllium Oxide Min Lee, Seung Hwan Yum, Jung Larsen, Eric S. Chul Lee, Woo Keun Kim, Seong Bielawski, Christopher W. Oh, Jungwoo Sci Rep Article Silicon-on-insulator (SOI) technology improves the performance of devices by reducing parasitic capacitance. Devices based on SOI or silicon-on-sapphire technology are primarily used in high-performance radio frequency (RF) and radiation sensitive applications as well as for reducing the short channel effects in microelectronic devices. Despite their advantages, the high substrate cost and overheating problems associated with complexities in substrate fabrication as well as the low thermal conductivity of silicon oxide prevent broad applications of this technology. To overcome these challenges, we describe a new approach of using beryllium oxide (BeO). The use of atomic layer deposition (ALD) for producing this material results in lowering the SOI wafer production cost. Furthermore, the use of BeO exhibiting a high thermal conductivity might minimize the self-heating issues. We show that crystalline Si can be grown on ALD BeO and the resultant devices exhibit potential for use in advanced SOI technology applications. Nature Publishing Group UK 2017-10-16 /pmc/articles/PMC5643296/ /pubmed/29038543 http://dx.doi.org/10.1038/s41598-017-13693-6 Text en © The Author(s) 2017 Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.
spellingShingle Article
Min Lee, Seung
Hwan Yum, Jung
Larsen, Eric S.
Chul Lee, Woo
Keun Kim, Seong
Bielawski, Christopher W.
Oh, Jungwoo
Advanced Silicon-on-Insulator: Crystalline Silicon on Atomic Layer Deposited Beryllium Oxide
title Advanced Silicon-on-Insulator: Crystalline Silicon on Atomic Layer Deposited Beryllium Oxide
title_full Advanced Silicon-on-Insulator: Crystalline Silicon on Atomic Layer Deposited Beryllium Oxide
title_fullStr Advanced Silicon-on-Insulator: Crystalline Silicon on Atomic Layer Deposited Beryllium Oxide
title_full_unstemmed Advanced Silicon-on-Insulator: Crystalline Silicon on Atomic Layer Deposited Beryllium Oxide
title_short Advanced Silicon-on-Insulator: Crystalline Silicon on Atomic Layer Deposited Beryllium Oxide
title_sort advanced silicon-on-insulator: crystalline silicon on atomic layer deposited beryllium oxide
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5643296/
https://www.ncbi.nlm.nih.gov/pubmed/29038543
http://dx.doi.org/10.1038/s41598-017-13693-6
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