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Review Article: Unraveling synergistic effects in plasma-surface processes by means of beam experiments
The interaction of plasmas with surfaces is dominated by synergistic effects between incident ions and radicals. Film growth is accelerated by the ions, providing adsorption sites for incoming radicals. Chemical etching is accelerated by incident ions when chemical etching products are removed from...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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American Vacuum Society
2017
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5648578/ https://www.ncbi.nlm.nih.gov/pubmed/29104360 http://dx.doi.org/10.1116/1.4983275 |