Silicon Nitride Deposition for Flexible Organic Electronic Devices by VHF (162 MHz)-PECVD Using a Multi-Tile Push-Pull Plasma Source

Depositing a barrier film for moisture protection without damage at a low temperature is one of the most important steps for organic-based electronic devices. In this study, the authors investigated depositing thin, high-quality SiN(x) film on organic-based electronic devices, specifically, very hig...

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Detalles Bibliográficos
Autores principales: Kim, Ki Seok, Kim, Ki Hyun, Ji, You Jin, Park, Jin Woo, Shin, Jae Hee, Ellingboe, Albert Rogers, Yeom, Geun Young
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5648850/
https://www.ncbi.nlm.nih.gov/pubmed/29051604
http://dx.doi.org/10.1038/s41598-017-14122-4

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5648850/
https://www.ncbi.nlm.nih.gov/pubmed/29051604
http://dx.doi.org/10.1038/s41598-017-14122-4

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