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Conduction Mechanism and Improved Endurance in HfO(2)-Based RRAM with Nitridation Treatment
A nitridation treatment technology with a urea/ammonia complex nitrogen source improved resistive switching property in HfO(2)-based resistive random access memory (RRAM). The nitridation treatment produced a high performance and reliable device which results in superior endurance (more than 10(9) c...
Autores principales: | , , , , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Springer US
2017
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5658308/ https://www.ncbi.nlm.nih.gov/pubmed/29075921 http://dx.doi.org/10.1186/s11671-017-2330-3 |