Automated Axis Alignment for a Nanomanipulator inside SEM and Its Error Optimization

In the motion of probing nanostructures, repeating position and movement is frequently happing and tolerance for position error is stringent. The consistency between the axis of manipulators and image is very significant since the visual servo is the most important tool in the automated manipulation...

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Detalles Bibliográficos
Autores principales: Zhou, Chao, Deng, Lu, Cheng, Long, Cao, Zhiqiang, Wang, Shuo, Tan, Min
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Hindawi 2017
Materias:
Research Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5661803/
https://www.ncbi.nlm.nih.gov/pubmed/29109809
http://dx.doi.org/10.1155/2017/3982503

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5661803/
https://www.ncbi.nlm.nih.gov/pubmed/29109809
http://dx.doi.org/10.1155/2017/3982503

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