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Ta(2)N(3) nanocrystals grown in Al(2)O(3) thin layers
Tantalum nitride nanoparticles (NPs) and cubic bixbyite-type Ta(2)N(3) nanocrystals (NCs) were grown in (Ta–N+Al(2)O(3))/Al(2)O(3) periodic multilayers (MLs) after thermal treatment. The MLs were prepared by magnetron deposition at room temperature and characterized using grazing incidence small-ang...
Autores principales: | , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Beilstein-Institut
2017
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5669238/ https://www.ncbi.nlm.nih.gov/pubmed/29114442 http://dx.doi.org/10.3762/bjnano.8.215 |