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Ta(2)N(3) nanocrystals grown in Al(2)O(3) thin layers

Tantalum nitride nanoparticles (NPs) and cubic bixbyite-type Ta(2)N(3) nanocrystals (NCs) were grown in (Ta–N+Al(2)O(3))/Al(2)O(3) periodic multilayers (MLs) after thermal treatment. The MLs were prepared by magnetron deposition at room temperature and characterized using grazing incidence small-ang...

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Detalles Bibliográficos
Autores principales: Salamon, Krešimir, Buljan, Maja, Šarić, Iva, Petravić, Mladen, Bernstorff, Sigrid
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Beilstein-Institut 2017
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5669238/
https://www.ncbi.nlm.nih.gov/pubmed/29114442
http://dx.doi.org/10.3762/bjnano.8.215