A 4 mm(2) Double Differential Torsional MEMS Accelerometer Based on a Double-Beam Configuration

This paper reports the design and simulation of a 4 mm(2) double differential torsional MEMS accelerometer based on a double-beam configuration. Based on the structure of conventional torsional accelerometers, normally composed of one pair of proof masses and one torsional beam, this work explores t...

Descripción completa

Detalles Bibliográficos
Autores principales: Miao, Tongqiao, Xiao, Dingbang, Li, Qingsong, Hou, Zhanqiang, Wu, Xuezhong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5677433/
https://www.ncbi.nlm.nih.gov/pubmed/28974039
http://dx.doi.org/10.3390/s17102264

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5677433/
https://www.ncbi.nlm.nih.gov/pubmed/28974039
http://dx.doi.org/10.3390/s17102264

Ejemplares similares