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A 4 mm(2) Double Differential Torsional MEMS Accelerometer Based on a Double-Beam Configuration
This paper reports the design and simulation of a 4 mm(2) double differential torsional MEMS accelerometer based on a double-beam configuration. Based on the structure of conventional torsional accelerometers, normally composed of one pair of proof masses and one torsional beam, this work explores t...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2017
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5677433/ https://www.ncbi.nlm.nih.gov/pubmed/28974039 http://dx.doi.org/10.3390/s17102264 |