A Generalized Polynomial Chaos-Based Approach to Analyze the Impacts of Process Deviations on MEMS Beams

A microstructure beam is one of the fundamental elements in MEMS devices like cantilever sensors, RF/optical switches, varactors, resonators, etc. It is still difficult to precisely predict the performance of MEMS beams with the current available simulators due to the inevitable process deviations....

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Detalles Bibliográficos
Autores principales: Gao, Lili, Zhou, Zai-Fa, Huang, Qing-An
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5712852/
https://www.ncbi.nlm.nih.gov/pubmed/29117096
http://dx.doi.org/10.3390/s17112561

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5712852/
https://www.ncbi.nlm.nih.gov/pubmed/29117096
http://dx.doi.org/10.3390/s17112561

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