Precise Measurement of Gas Volumes by Means of Low-Offset MEMS Flow Sensors with μL/min Resolution

Experiments devoted to evaluate the performance of a MEMS thermal flow sensor in measuring gas volumes are described. The sensor is a single-chip platform, including several sensing structures and a low-offset, low-noise readout interface. A recently proposed offset compensation approach is implemen...

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Detalles Bibliográficos
Autores principales: Piotto, Massimo, Del Cesta, Simone, Bruschi, Paolo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5712980/
https://www.ncbi.nlm.nih.gov/pubmed/29088091
http://dx.doi.org/10.3390/s17112497

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5712980/
https://www.ncbi.nlm.nih.gov/pubmed/29088091
http://dx.doi.org/10.3390/s17112497

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