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Precise Measurement of Gas Volumes by Means of Low-Offset MEMS Flow Sensors with μL/min Resolution
Experiments devoted to evaluate the performance of a MEMS thermal flow sensor in measuring gas volumes are described. The sensor is a single-chip platform, including several sensing structures and a low-offset, low-noise readout interface. A recently proposed offset compensation approach is implemen...
Autores principales: | Piotto, Massimo, Del Cesta, Simone, Bruschi, Paolo |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2017
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5712980/ https://www.ncbi.nlm.nih.gov/pubmed/29088091 http://dx.doi.org/10.3390/s17112497 |
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